设计并制做了一种新型多重嵌套悬臂梁结构的磁致动微机械偏转器.偏转器由1.2 μm CMOS工艺和各向异性腐蚀工艺制成.致动原理是电流与磁场的相互作用在悬梁上产生罗仑兹力.测量了偏转器的静态和动态特性.测量结果表明,这种微偏转器的特点是可双向偏转且偏转角度大且具有快的时间响应.

A novel megnetically actuated micromachined deflector with structure of multiple nested cantilevers is designed and fabricated.The device is manufactured using 1.2μm CMOS process followed by anisotropoic etching.Actuation is produced by Lorentz force due to interaction between the currents flowing in the cantilevers and an external magnetic field.Static and dynamic responses are measured.The results show that the deflector has the features of a large,bidirectional angular deflection and fast time response.