肖特基型β-Ga2O3日盲紫外光电探测器

doi:10.3969/j.issn.0372-2112.2020.06.027

电子学报 ›› 2020, Vol. 48 ›› Issue (6): 1240-1243.DOI: 10.3969/j.issn.0372-2112.2020.06.027

肖特基型β-Ga₂O₃日盲紫外光电探测器

杨莲红¹, 张保花¹, 郭福强¹, 陈敦军²

1. 昌吉学院物理系, 新疆昌吉 831100;
2. 南京大学电子科学与工程学院, 江苏南京 210093

收稿日期:2019-08-13 修回日期:2019-11-14 出版日期:2020-06-25
- 通讯作者:
- 张保花
- 作者简介:
- 杨莲红 女,1969年7月出生于新疆维吾尔自治区吐鲁番地区,现为昌吉学院物理系副教授,硕士生导师,主要研究方向为宽带隙半导体材料及器件的研究. E-mail:1498853912@qq.com
- 基金资助:
- 新疆维吾尔自治区科技厅自然科学基金项目 (No.2016D01C002）

Schottky β-Ga₂O₃ Solar-Blind UV Photodetectors

YANG Lian-hong¹, ZHANG Bao-hua¹, GUO Fu-qiang¹, CHEN Dun-jun²

1. Department of Physics, Changji University, Changji, Xinjiang 831100, China;
2. School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu 210093, China

Received:2019-08-13 Revised:2019-11-14 Online:2020-06-25 Published:2020-06-25

摘要/Abstract

摘要： 本文制备并研究了肖特基型β-Ga₂O₃日盲紫外光电探测器.结果表明：通过脉冲激光沉积外延生长的β-Ga₂O₃的（-201）晶面 X射线衍射峰半高宽仅为36 arcsec，表现出了高的晶体质量；光暗条件下的I-V曲线显示所制备的器件具有明显的肖特基整流特性，在-5V偏压下暗电流保持在0.1nA量级，正向导通电压为1.5V；光电流谱显示器件在240nm处存在显著的峰值响应，并在260nm左右呈现陡峭的截止边，日盲紫外的带内带外抑制比达到1000.同时，也研究了不同掺杂对Ga₂O₃晶体质量的影响.

关键词: 肖特基, β-Ga₂O₃, 日盲紫外光电探测器

Abstract: In this work,we fabricate and investigate the Schottky β-Ga₂O₃ solar-blind UV photodetectors.The results show that full width at half maximum of the X-ray diffraction peak from (-201) plane of the β-Ga₂O₃ grown by pulsed laser deposition is only 36 arcsec,indicating that the epitaxial β-Ga₂O₃ has a high crystal quality.The fabricated Schottky diodes based on the β-Ga₂O₃ exhibits obvious Schottky rectification characteristic,and the dark current maintains at 0.1 nA magnitude under -5 V bias voltage,and forward conduction voltage is 1.5 V.The photocurrent spectrum show that the device exhibits remarkable peak response at 240 nm,a steep cutoff wavelength at 260 nm,and a rejection ratio of 1000 between in-band and out-band of solar-blind ultraviolet.Meantime,the effects of different dopants on the crystal quality of β-Ga₂O₃ are also studied.

Key words: Schottky, β-Ga₂O₃, solar-blind UV photodetector

中图分类号:

TL814

杨莲红, 张保花, 郭福强, 陈敦军. 肖特基型β-Ga₂O₃日盲紫外光电探测器[J]. 电子学报, 2020, 48(6): 1240-1243.

YANG Lian-hong, ZHANG Bao-hua, GUO Fu-qiang, CHEN Dun-jun. Schottky β-Ga₂O₃ Solar-Blind UV Photodetectors[J]. Acta Electronica Sinica, 2020, 48(6): 1240-1243.

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肖特基型β-Ga₂O₃日盲紫外光电探测器

Schottky β-Ga₂O₃ Solar-Blind UV Photodetectors

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