基于TCAD的绝缘体上硅器件总剂量效应仿真技术研究

doi:10.3969/j.issn.0372-2112.2019.08.020

电子学报 ›› 2019, Vol. 47 ›› Issue (8): 1755-1761.DOI: 10.3969/j.issn.0372-2112.2019.08.020

基于TCAD的绝缘体上硅器件总剂量效应仿真技术研究

彭超, 雷志锋, 张战刚, 何玉娟, 黄云, 恩云飞

电子元器件可靠性物理及其应用技术国家级重点实验室, 工业和信息化部电子第五研究所, 广东广州, 510610

收稿日期:2019-01-11 修回日期:2019-04-16 出版日期:2019-08-25
- 通讯作者:
- 彭超
- 作者简介:
- 雷志锋 男,1982年6月出生,河南洛阳人,工业和信息化部电子第五研究所高级工程师,主要从事半导体器件可靠性研究.E-mail:leizf@ceprei.com
- 基金资助:
- 国家自然科学基金 (No.61704031）

Research on Total Ionizing Dose Effect Simulation Technology of Silicon-on-Insulator Device Based on TCAD

PENG Chao, LEI Zhi-feng, ZHANG Zhan-gang, HE Yu-juan, HUANG Yun, EN Yun-fei

Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, China Electronic Product Reliability and Environmental Testing Research Institute, Guangzhou, Guangdong 510610, China

Received:2019-01-11 Revised:2019-04-16 Online:2019-08-25 Published:2019-08-25

摘要/Abstract

摘要： 绝缘体上硅（Silicon-on-Insulator，SOI）器件的全介质隔离结构改善了其抗单粒子效应性能，但也使其对总剂量效应更加敏感.为了评估SOI器件的总剂量效应敏感性，本文提出了一种基于TCAD （Technology Computer Aided Design）的总剂量效应仿真技术.通过对SOI器件三维结构进行建模，利用TCAD内置的辐射模型开展瞬态仿真，模拟氧化层中辐射感应电荷的产生、输运和俘获过程，从而分别评估绝缘埋层（Buried Oxide，BOX）和浅沟槽隔离（Shallow Trench Isolation，STI）氧化层中辐射感应陷阱电荷对器件电学性能的影响.基于该仿真技术，本文分别研究了不同偏置、沟道长度、体区掺杂浓度以及STI形貌对SOI MOSFET器件总剂量辐射效应的影响.仿真结果表明高浓度的体区掺杂、较小的STI凹槽深度和更陡峭的STI侧壁将有助于改善SOI器件的抗总剂量效应性能.

关键词: 绝缘体上硅, 总剂量效应, 浅沟槽隔离, TCAD仿真

Abstract: The fully dielectric isolation structure of Silicon-on-Insulator (SOI) devices improves their immunity to single event effects,but also makes them more sensitive to total ionizing dose (TID) effects.In order to evaluate the sensitivity of SOI devices to TID effects,a simulation method based on TCAD (Technology Computer Aided Design) was proposed.By modeling the three-dimensional structure of SOI devices and using the TCAD built-in radiation model to simulate the generation,transport and capture of radiation-induced charges in oxide layer,the effects of radiation-induced trap charges in buried oxide (BOX) and shallow trench isolation (STI) oxide on the electrical properties of SOI devices are evaluated respectively.Based on this simulation technique,the effects of radiation bias,channel length,body doping concentration and STI morphology on TID effect of SOI MOSFET were investigated.The simulation results show that higher body doping concentration,smaller STI divot depth and steeper STI sidewall will be helpful to improve the TID hardness performance of SOI devices.

Key words: silicon on insulator, total ionizing dose effect, shallow trench isolation, technology computer aided design

中图分类号:

TN386.4

彭超, 雷志锋, 张战刚, 何玉娟, 黄云, 恩云飞. 基于TCAD的绝缘体上硅器件总剂量效应仿真技术研究[J]. 电子学报, 2019, 47(8): 1755-1761.

PENG Chao, LEI Zhi-feng, ZHANG Zhan-gang, HE Yu-juan, HUANG Yun, EN Yun-fei. Research on Total Ionizing Dose Effect Simulation Technology of Silicon-on-Insulator Device Based on TCAD[J]. Acta Electronica Sinica, 2019, 47(8): 1755-1761.

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基于TCAD的绝缘体上硅器件总剂量效应仿真技术研究

Research on Total Ionizing Dose Effect Simulation Technology of Silicon-on-Insulator Device Based on TCAD

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