电子学报 ›› 2020, Vol. 48 ›› Issue (6): 1240-1243.DOI: 10.3969/j.issn.0372-2112.2020.06.027

• 科研通信 • 上一篇    下一篇

肖特基型β-Ga2O3日盲紫外光电探测器

杨莲红1, 张保花1, 郭福强1, 陈敦军2   

  1. 1. 昌吉学院物理系, 新疆昌吉 831100;
    2. 南京大学电子科学与工程学院, 江苏南京 210093
  • 收稿日期:2019-08-13 修回日期:2019-11-14 出版日期:2020-06-25 发布日期:2020-06-25
  • 通讯作者: 张保花
  • 作者简介:杨莲红 女,1969年7月出生于新疆维吾尔自治区吐鲁番地区,现为昌吉学院物理系副教授,硕士生导师,主要研究方向为宽带隙半导体材料及器件的研究. E-mail:1498853912@qq.com
  • 基金资助:
    新疆维吾尔自治区科技厅自然科学基金项目(No.2016D01C002)

Schottky β-Ga2O3 Solar-Blind UV Photodetectors

YANG Lian-hong1, ZHANG Bao-hua1, GUO Fu-qiang1, CHEN Dun-jun2   

  1. 1. Department of Physics, Changji University, Changji, Xinjiang 831100, China;
    2. School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu 210093, China
  • Received:2019-08-13 Revised:2019-11-14 Online:2020-06-25 Published:2020-06-25

摘要: 本文制备并研究了肖特基型β-Ga2O3日盲紫外光电探测器.结果表明:通过脉冲激光沉积外延生长的β-Ga2O3的(-201)晶面 X射线衍射峰半高宽仅为36 arcsec,表现出了高的晶体质量;光暗条件下的I-V曲线显示所制备的器件具有明显的肖特基整流特性,在-5V偏压下暗电流保持在0.1nA量级,正向导通电压为1.5V;光电流谱显示器件在240nm处存在显著的峰值响应,并在260nm左右呈现陡峭的截止边,日盲紫外的带内带外抑制比达到1000.同时,也研究了不同掺杂对Ga2O3晶体质量的影响.

关键词: 肖特基, β-Ga2O3, 日盲紫外光电探测器

Abstract: In this work,we fabricate and investigate the Schottky β-Ga2O3 solar-blind UV photodetectors.The results show that full width at half maximum of the X-ray diffraction peak from (-201) plane of the β-Ga2O3 grown by pulsed laser deposition is only 36 arcsec,indicating that the epitaxial β-Ga2O3 has a high crystal quality.The fabricated Schottky diodes based on the β-Ga2O3 exhibits obvious Schottky rectification characteristic,and the dark current maintains at 0.1 nA magnitude under -5 V bias voltage,and forward conduction voltage is 1.5 V.The photocurrent spectrum show that the device exhibits remarkable peak response at 240 nm,a steep cutoff wavelength at 260 nm,and a rejection ratio of 1000 between in-band and out-band of solar-blind ultraviolet.Meantime,the effects of different dopants on the crystal quality of β-Ga2O3 are also studied.

Key words: Schottky, β-Ga2O3, solar-blind UV photodetector

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