超低导通电阻沟槽栅LDMOS器件研究
吝晓楠, 吴团庄, 许超奇, 李仁伟, 张仪, 薛璐洁, 陈淑娴, 林峰, 刘斯扬, 孙伟锋
Research on Ultra-Low On-Resistance Trench Gate LDMOS Device
LIN Xiao-nan, WU Tuan-zhuang, XU Chao-qi, LI Ren-wei, ZHANG Yi, XUE Lu-jie, CHEN Shu-xian, LIN Feng, LIU Si-yang, SUN Wei-feng
电子学报
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2023, (8): 1995
-2002
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DOI: 10.12263/DZXB.20220020
