半导体工业废水、废气中砷、磷、硫、氟、氯及氮氧化物和重金属的综合治理

闻瑞梅

A Comprehensive Abatement Technology for Arsine,Phosphorus, Sulfur,Fluorine,Chlorine,Oxynitrides and Heavy Metals in Semiconductor Industry Waste Water and Gases

WEN Rui-mei

电子学报 . 2000, (11): 1 -3 .

模态框（Modal）标题