a-SiCx∶H和β-SiC中Er缺陷结构及其1.54μm发光探索

薛俊明;孙钟林;刘志钢;周伟

The Structure and 1.54μm Luminescence of Er Defects in a-SiCx∶H and β-SiC

XUE Jun-ming;SUN Zhong-lin;LIU Zhi-gang;ZHOU Wei

电子学报 . 2000, (8): 135 -138 .