用于谐振式传感器的微型双层薄板热挠曲的研究

姚振华;朱长纯;程敏;刘君华

A Study of Thermal Buckling Characteristics of Micro-double Layer Membrane Used in Resonant Sensor

YAO Zhen-hua;ZHU Chang-chun;CHENG Min;LIU Jun-hua

电子学报 . 2000, (2): 59 -61 .