半导体工艺用高纯水中硅、硼的去除

闻瑞梅;邓守权;张亚峰;葛伟伟

The Removal of Silicon and Boron in Ultra-Pure Water for Semiconductor Processes

WEN Rui-mei;DENG Shou-quan;ZHANG Ya-feng;GE Wei-wei

电子学报 . 2005, (2): 197 -199 .