反应离子深刻蚀中加强热传递和抑制Notching效应的方法

丁海涛;杨振川;闫桂珍

A Dual-Purpose Method to Enhance Heat Transfer and Prevent Notching Effect in Deep Reactive Ion Etching

DING Hai-tao;YANG Zhen-chuan;YAN Gui-zhen

电子学报 . 2010, (5): 1201 -1204 .