VHF-PECVD制备不同衬底温度微晶硅薄膜结构研究
张晓丹, 赵颖, 高艳涛, 朱锋, 魏长春, 孙建, 耿新华, 熊绍珍
Structural Study of Microcrystalline Silicon Films Fabricated by VHF-PECVD at Different Substrate Temperatures
ZHANG Xiao-dan, ZHAO Ying, GAO Yan-tao, ZHU Feng, WEI Chang-chun, SUN Jian, GENG Xin-hua, XIONG Shao-zhen
电子学报
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2005, (5): 920
-922
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