硅基MEMS加工技术及其标准工艺研究
王阳元;武国英;郝一龙;张大成;肖志雄;李 婷;张国炳;张锦文
Study of Silicon-Based MEMS Technology and Its Standard Process
WANG Yang-yuan;WU Guo-ying;HAO Yi-long;ZHANG Da-cheng;XIAO Zhi-xiong;LI Ting;ZHANG Guo-bing;ZHANG Jin-wen
电子学报
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2002, (11): 1577
-1584
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