微空气桥隔离的自对准AlGaAs/GaAs异质结双极晶体管
严北平;张鹤鸣;戴显英
Self-aligned AlGaAs/GaAs HBT with Micro-airbridge Isolation
YAN Bei-ping;ZHANG He-ming;DAI Xian-ying
电子学报 . 2000, (11): 132 -134 .