静电曲轴宽电子束二级几何像差及系数的计算

张良忠;金伟其;周立伟

Computation on Geometrical Aberrations and Their Coefficient with Second-Order of Electrostatic Wide Electron Beam Having Curvilinear Axes

ZHANG Liang-zhong;JIN Wei-qi;ZHOU Li-wei

电子学报 . 2000, (2): 17 -19 .