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The Performance Improvement of Thin Film Bulk Acoustic Resonators by Frame Structure
WU Yong-le, WU Hao-peng, LAI Zhi-guo, CAI Xun, TANG Bin, YANG Qing-hua, YANG Yu-hao, WANG Wei-min
Acta Electronica Sinica . 2024, (2): 407 -413 .  DOI: 10.12263/DZXB.20220346

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