关键词: SiC雪崩光电二极管, 读出电路, 互补门控, 紫外单光子探测与成像

Abstract: Based on the wide bandgap semiconductor SiC APD ultraviolet single photon detector,a 1×8 linear array photon counting readout circuit is proposed in this paper.According to the condition of the light intensity and through suitable timing control,the unitary fixed mode or complementary gating detection mode can be selected to implement the functions of sensing and counting for the wide dynamic range ultraviolet photon signals.The readout integrated circuit is fabricated by TSMC 0.18μm CMOS process,the test results show that the readout circuit is capable of single photon detection,and the performance is in agreement with the expected prediction by the simulation results.Finally,the two-dimensional turntable of the micro-motion system is utilized to complete the solar blind single-wavelength photon detection and imaging,so as to implement accurate discrimination and target localization on the multiple independent ultraviolet light sources.

Key words: SiC avalanche photodiode(SiC APD), readout integrated circuit (ROIC), complementary gating, ultraviolet single photon detection and imaging