电子学报 ›› 2020, Vol. 48 ›› Issue (7): 1448-1452.DOI: 10.3969/j.issn.0372-2112.2020.07.025

• 科研通信 • 上一篇    下一篇

基于SiC APD的日盲紫外单光子计数读出电路设计与应用

吴金1, 郑丽霞1, 王力2, 田江江2, 张伟东2, 何维捷2, 孙伟锋2   

  1. 1. 东南大学无锡分校, 江苏无锡 214135;
    2. 东南大学微电子学院, 江苏南京 210096
  • 收稿日期:2018-08-13 修回日期:2020-01-11 出版日期:2020-07-25 发布日期:2020-07-25
  • 通讯作者: 郑丽霞
  • 作者简介:吴金 男,1965年3月30日出生于江苏南京,1991年和1997年于东南大学电子科学与工程学院分别获得工学硕士和博士学位,现为东南大学微电子学院教授、博士生导师.近期研究兴趣主要为时钟电路、时间数字转换电路以及红外单光子探测读出电路设计等.主持或参加过国家、省自然科学基金、国家"核高基"重点专项等各类项目研究.发表SCI/EI收录论文30余篇,授权国家发明专利8项.E-mail:jwu@seu.edu.cn
  • 基金资助:
    国家重点研发计划(No.2016YFB0400904);国家自然科学基金(No.61805036);江苏省自然科学基金(No.BK20181139);模拟集成电路重点实验室稳定支持项目(No.JCKY2019210C030)

Design and Application of SiC APD Based Single Photon Counting Readout Integrated Circuit for Solar Blind Ultraviolet Detection

WU Jin1, ZHENG Li-xia1, WANG Li2, TIAN Jiang-jiang2, ZHANG Wei-dong2, HE Wei-jie2, SUN Wei-feng2   

  1. 1. Branch School of Southeast University, Wuxi, Jiangsu 214135, China;
    2. Institute of Microelectronics, Southeast University, Nanjing, Jiangsu 210096, China
  • Received:2018-08-13 Revised:2020-01-11 Online:2020-07-25 Published:2020-07-25

摘要: 针对宽禁带半导体SiC APD紫外单光子探测器,本文提出了一种1×8线阵型单光子计数读出电路.根据光强条件并通过合适的时序控制,可选取固定门控或互补门控探测方式,实现宽动态范围紫外光子信号的探测计数.读出电路采用TSMC 0.18μm CMOS工艺制备,测试结果表明,读出电路具备单光子探测功能,性能与仿真分析预期结果吻合.最终,借助微动系统二维转台完成对日盲紫外单波长光子的探测与成像,实现对多个独立紫外光源的准确区分与目标定位.

关键词: SiC雪崩光电二极管, 读出电路, 互补门控, 紫外单光子探测与成像

Abstract: Based on the wide bandgap semiconductor SiC APD ultraviolet single photon detector,a 1×8 linear array photon counting readout circuit is proposed in this paper.According to the condition of the light intensity and through suitable timing control,the unitary fixed mode or complementary gating detection mode can be selected to implement the functions of sensing and counting for the wide dynamic range ultraviolet photon signals.The readout integrated circuit is fabricated by TSMC 0.18μm CMOS process,the test results show that the readout circuit is capable of single photon detection,and the performance is in agreement with the expected prediction by the simulation results.Finally,the two-dimensional turntable of the micro-motion system is utilized to complete the solar blind single-wavelength photon detection and imaging,so as to implement accurate discrimination and target localization on the multiple independent ultraviolet light sources.

Key words: SiC avalanche photodiode(SiC APD), readout integrated circuit (ROIC), complementary gating, ultraviolet single photon detection and imaging

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