半导体器件内离子有效LET值测量方法研究
史淑廷, 郭刚, 刘建成, 蔡莉, 陈泉, 沈东军, 惠宁, 张艳文, 覃英参, 韩金华, 陈启明, 张付强, 殷倩, 肖舒颜
Study of Measurement of the Ion Effective LET in Semiconductor Devices
SHI Shu-ting, GUO Gang, LIU Jian-cheng, CAI Li, CHEN Quan, SHEN Dong-jun, HUI Ning, ZHANG Yan-wen, QIN Ying-can, HAN Jin-hua, CHEN Qi-ming, ZHANG Fu-qiang, YIN Qian, XIAO Shu-yan
电子学报
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2018, (10): 2546
-2550
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DOI: 10.3969/j.issn.0372-2112.2018.10.032
