具有L型栅极场板的双槽双栅绝缘体上硅器件新结构
代红丽, 赵红东, 王洛欣, 石艳梅, 李明吉
A Dual-Trench-Gate Silicon on Insulator Device with a L-shaped Gate Field Plate
DAI Hong-li, ZHAO Hong-dong, WANG Luo-xin, SHI Yan-mei, LI Ming-ji
电子学报
.
2018, (5): 1146
-1152
.
DOI: 10.3969/j.issn.0372-2112.2018.05.019
