退火温度对基于Bi1.5Zn1.05Nb1.5O7栅绝缘层的ZnO-TFTs性能的影响
张琦, 叶伟, 孙芳莉, 萧生, 杜鹏飞
Effect of Annealing Temperature on Performance of ZnO-TFTs Based on Bi1.5Zn1.05Nb1.5O7 Gate Insulator
ZHANG Qi, YE Wei, SUN Fang-li, XIAO Sheng, DU Peng-fei
电子学报
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2022, (2): 455
-460
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DOI: 10.12263/DZXB.20210031
