绝缘体上硅功率半导体单芯片集成技术
张龙, 刘斯扬, 孙伟锋, 马杰, 盘成务, 何乃龙, 张森, 苏巍
Study on the Silicon-on-Insulator Power Semiconductor Monolithic Integration Technology
ZHANG Long, LIU Si-yang, SUN Wei-feng, MA Jie, PAN Cheng-wu, HE Nai-long, ZHANG Sen, SU Wei
电子学报
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2023, (2): 514
-526
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DOI: 10.12263/DZXB.20220492
