锗预非晶化注入对镍硅(NiSi)金属栅功函数的影响研究

蔡一茂, 黄如, 单晓楠, 周发龙, 王阳元

Study on the Impact of Germanium Preamorphization on the Work Function of Fully Silicided NiSi Gate

CAI Yi-mao, HUANG Ru, SHAN Xiao-nan, ZHOU Fa-long, WANG Yang-yuan

电子学报 . 2006, (8): 1534 -1536 .