室温工作双敏感膜HSGFET型O3传感器的研究
牛文成;孙学珠;吴小晔;李华伟;那兴波;俞 梅;陈兴梧;张福海;谢建湘
HSGFET Ozone Sensor with Dual Sensitive Layer Operating at Room Temperature
NIU Wen-cheng;SUN Xue-zhu;WU Xiao-ye;LI Hua-wei;NA Xing-bo;YU Mei;CHEN Xing-wu;ZHANG Fu-hai;XIE Jian-xiang
电子学报
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2001, (5): 604
-606
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