多重嵌套悬臂梁结构磁致动微机械偏转器

胡明;B.Shen;W.Allegretto;A.M.Robinson

Megnetically Actuated Micromachined Deflector with Structure of Multiple Nested Cantilevers

Hu Ming;B.Shen;W.Allegretto;A.M.Robinson

电子学报 . 2000, (2): 122 -123 .