降低超大规模集成电路用高纯水中总有机碳的能量传递光化学模型
闻瑞梅;梁骏吾
An Energy Transfer Photochemical Model for the Abatement of Total Organic Carbon in High Purity Water Used in ULSI Fabrication
WEN Rui-Mei;LIANG Jun-Wu
电子学报 . 2003, (11): 1601 -1604 .