倾斜梳齿的MEMS电容式传感器惯性脉冲响应特性研究

董林玺;颜海霞;钱 ;孙玲玲

Study of Inertial Pulse Response of MEMS Capacitive Accelerometer with Non-Parallel Combs

DONG Lin-xi;YAN Hai-xia;QIAN Xian;SUN Ling-ling

电子学报 . 2008, (5): 1035 -1040 .