新型磁驱动增大检测电容的高精度MEMS惯性传感器研究

董林玺;焦继伟;颜海霞;孙玲玲

A Novel MEMS Inertial Sensor with the Actuators Drived by Lorentz Forcefor Increasing the Initial Sensing Capacitance

DONG Lin-xi;JIAO Ji-wei;YAN Hai-xia;SUN Ling-ling

电子学报 . 2010, (5): 1053 -1057 .