GaN外延结构中微区应变场的测量和评价
王俊忠;吉 元;田彦宝;牛南辉;徐 晨;韩 军;郭 霞;沈光地
Measurement and Evaluation of Micro-Sized Strain Fields in GaN Epitaxial Structure
WANG Jun-zhong;JI Yuan;TIAN Yan-bao;NIU Nan-hui;XU Chen;HAN Jun;GUO Xia;SHEN Guang-di
电子学报
.
2008, (11): 2139
-2143
.
