微机械光调制器的制备及其在不同激励条件下的响应研究

茅惠兵;忻佩胜;柯菁华;赖宗声

Response Study of the Micromechanical Modulator under Different Drive Conditions

MAO Hui-bing;XING Pei-sheng;KE Jing-hua;LAI Zong-sheng

电子学报 . 2002, (2): 262 -265 .