MEMS薄膜平均应力梯度及弹性模量在线提取方法

戎华, 黄庆安, 王鸣

A Method for In-Situ Measuring Average Stress Gradient and Elastic Modulus of a MEMS Film

RONG Hua, HUANG Qing-an, WANG Ming

电子学报 . 2007, (2): 311 -314 .