MCM-C基板上的多层互连及厚膜电阻的可靠性研究
郭春生;李志国
Study on Reliability of Multi-Layer Interconnection and Thick-Film Resistors in MCM-C Substrates
GUO Chun-sheng;LI Zhi-guo
电子学报 . 2005, (8): 1519 -1522 .