基于MEMS技术的智能传感器系统(“智能灰尘”)
张紫辰, 董恺琛, 张益源, 王建中, 赵嘉昊, 尤政
MEMS-Based Smart Sensing System ("Smart Dust")
ZHANG Zi-chen, DONG Kai-chen, ZHANG Yi-yuan, WANG Jian-zhong, ZHAO Jia-hao, YOU Zheng
电子学报
.
2015, (10): 2095
-2109
.
DOI: 10.3969/j.issn.0372-2112.2015.10.032
